The diffusion of Zn into heterostructures, from spun-on polymer films which contained no Si-organic compounds, was investigated. It was shown that the initial non-equilibrium stage of diffusion, and the defect relaxation process, determined the final profile of the Zn distribution; as well as its anomalies. The results demonstrated the important role which was played by the kick-out mechanism in the formation of a sharp diffusion profile slope as well as in Zn gettering at a hetero-interface.

B.J.Ber, L.A.Busygina, A.T.Gorelenok, A.V.Kamanin, A.V.Merkulov, I.A.Mokina, N.M.Shmidt, I.J.Yakimenko, T.A.Yurre: Materials Science Forum, 1994, 143-147, 1415-20