The diffusion of Fe was found to occur via the kick-out mechanism. A published Fe diffusion profile in InP was simulated by using the complete set of 3 partial differential equations for the kick-out mechanism. A value for the contribution which In self-interstitials made to the self-diffusion coefficient of InP was deduced and was found to be much smaller than was suggested by the known self-diffusion coefficients which had been determined from In tracer diffusion measurements.

H.Zimmermann, U.Gösele, T.Y.Tan: Applied Physics Letters, 1993, 62[1], 75-7