A short review was presented of the problems which were involved in the ion-beam processing of the monocrystalline carbide. Particular attention was paid to recent results concerning point defects, extended defects, and amorphization.

W.Skorupa, V.Heera, Y.Pacaud, H.Weishart: Nuclear Instruments and Methods in Physics Research B, 1996, 120[1-4], 114-20