An analytical model for such interactions was reported which was suitable for low-energy beam deposition. An approximation to the nuclear stopping power was used to obtain an analytical solution for the energy that was deposited in the solid. The ratio of the deposited energy in the bulk, to the energy that was deposited in the surface, yielded a ceiling for the beam energy. Above this, more defects were generated in the bulk; thus resulting in defective films. The numerical predictions agreed with published results.

S.Mohajerzadeh, C.R.Selvakumar: Journal of Applied Physics, 1997, 81[7], 3003-6