The depth distributions of F2 centers in thin films that had been irradiated using 15 or 30keV beams were measured by using optical absorption techniques and multi-layered LiF/KBr films. Monte Carlo simulations of the effect of electron beams were also carried out in order to predict the dissipated energies and the ionization depth profiles. It was found that the ionization and dissipated energy profiles had essentially the same shape, with their maxima at a depth that was equal to 41% of the electron range. The F2 distributions could be described by Gaussian distributions which were centered at depths of 1.5 or 1.6 for 15 and 30keV beams, respectively.

L.G.Jacobsohn, R.A.Nunes, L.C.Scavarda do Carmo: Journal of Applied Physics, 1997, 81[3], 1192-5