Monocrystals of <111> type were implanted with 150keV Ar ions at temperatures of between 5 and 300K, and were analyzed by means of -particle channelling in a back-scattering geometry. Similar damage ranges were observed at all temperatures, and the ranges did not change during heating. However, the defect density changed significantly in the case of the 5K implantation. The observations did not support the operation of a simple point defect migration process, as interstitial atoms became mobile only above 45K.

E.Friedland, N.G.Van der Berg, O.Meyer, S.Kalbitzer: Nuclear Instruments and Methods in Physics Research B, 1996, 118[1-4], 29-33