Samples were irradiated with 209MeV Kr ions in a direction that was parallel to the (100) plane. The variation, as a function of the distance from the irradiated edge - the (010) plane - of the defects that were produced by irradiation, was evaluated by means of atomic force microscopy and spreading resistance measurements on the (100) plane. Both methods indicated a penetration depth of 28. This was in good agreement with the value that was predicted by Monte Carlo range calculations. The atomic force microscopic measurements permitted a distinction to be drawn between 4 depth zones to which various damage production mechanisms could be attributed.

L.P.Biró, J.Gyulai, K.Havancsak, A.J.Didyk, S.Bogen, L.Frey: Physical Review B, 1996, 54[17], 11853-6