Dopant redistribution, during rapid thermal annealing, from implantation-doped polycrystalline films into monocrystals was studied. Diffusivity and co-diffusivity data were deduced from secondary ion mass spectrometry results.

C.Gontrand, C.Dubois, A.Laugier: Journal of Physics - Condensed Matter, 1991, 3[18], 3091-8