Rutherford back-scattering and channelling spectrometry were used to investigate changes in the crystal structure of surface layers, and dopant accumulation during the self-annealing As+ ion irradiation of monocrystals. It was found that irradiation with ion beams of high current density (about 0.0002A/cm2) resulted in an anomalous redistribution of the impurities towards the bulk of the crystal. The As redistribution mechanism which was most likely to explain the observations was impurity diffusion via the inverse Kirkendall effect.

F.F.Komarov, A.P.Novikov, E.V.Kotov, E.A.Podlipko: Physica Status Solidi A, 1989, 112[1], 323-6