The effect of a low-temperature (about 100C) plasma treatment upon the properties of near-surface layers was studied. It was found that a decrease in the concentration of deep-level centers, as well as the formation of new vacancy-related complexes at a depth of 0.001 to 0.01mm, occurred. The changes in the properties were closely related to the generation of intrinsic point defects. Experimental data which confirmed the possibility of enhanced Au diffusion were presented.

S.V.Koveshnikov, E.B.Yakimov, N.A.Yarykin, V.A.Yunkin: Physica Status Solidi A, 1989, 111[1], 81-8