The concentration profiles of the deep levels (Ec - 0.54eV, Ec - 0.24eV, Ec - 0.30eV, Ec - 0.16eV) which were introduced by Au diffusion (1150C, 6h) were measured by using deep-level transient spectroscopic methods. The profile of Ec - 0.54eV agreed well with that of Au atoms, as measured by means of neutron activation analysis. The shape of the profile of Ec - 0.24eV was very similar to that of Ec - 0.54eV, and the concentration ratio of Ec - 0.24eV to Ec - 0.54eV was almost constant at 0.12. The existence of the Ec - 0.16eV level depended upon the method which was used to prepare the Schottky diode for deep-level transient spectroscopic measurements. The shape of the profile of the Ec - 0.16eV level, when observed, was similar to that of the Ec - 0.54eV level. The profile of Ec - 0.30eV was quite different to those of other levels, and the concentration level was almost constant throughout the thickness.

M.Takahashi, M.Morooka, F.Ueda, F.Hashimoto: Japanese Journal of Applied Physics 1, 1994, 33[4A], 1713-6