Account was taken of substitutional Au, interstitial Au, vacancies, and self-interstitials in the partial differential equations for Au diffusion involving dissociative and kick-out mechanisms. As it was time-consuming to solve the equations numerically, it was found more convenient to solve the approximate partial differential equation (for substitutional Au) which was obtained after reactions between the 4 species had reached their local equilibrium states and the interstitial Au had reached its thermal equilibrium state under suitable boundary and initial conditions. In the case of in-diffusion processes, the conditions for the approximate equation were different to those for the basic equation. In the case of annealing processes, the conditions were the same for the basic and for the approximate equation.

M.Morooka, M.Yoshida: Japanese Journal of Applied Physics, 1989, 28[3], 457-63