Analytical techniques and computer simulation methods were used to study the out-diffusion characteristics of Au. The analysis was based upon the kick-out mechanism, and assumed the applicability of various boundary conditions. An estimate for the Au backside gettering efficiency was obtained, and various process-limiting factors were considered. In particular, out-diffusion simulation results were presented for Sii recombination and generation in a given volume.

H.Gdanitz, K.Schmalz: Physica Status Solidi A, 1990, 117[2], 395-402