The effect of N co-implantation in suppressing B penetration into p+-type polycrystalline material was investigated. The co-implantation of N with BF2+ led to combination with B so as to form B-N complexes. This resulted in a retardation of the B diffusion.

T.S.Chao, M.C.Liaw, C.H.Chu, C.Y.Chang, C.H.Chien, C.P.Hao, T.F.Lei: Applied Physics Letters, 1996, 69[12], 1781-2