An analysis was made of discrepancies concerning the diffusivity of B. In the case of an inert atmosphere and a BN source, an independence of the diffusivity with respect to the B concentration was found. Using a non-Fickian model based upon Si exodiffusion, an analytical expression (ratio of 2 erfc terms) was obtained for the diffusion profile.

E.Dominguez, M.Jaraiz: Journal of the Electrochemical Society, 1986, 133[9], 1895-900