A macroscopic model for dopant diffusion, involving dopant-dopant interactions, was extended so as to include 3-dimensional effects. The model was applied to dopant diffusion in thin crystalline films under conditions where a second dopant was present in high concentrations and was distributed uniformly throughout the film. It was found that this resulted in an unexpected thickness dependence of the behavior in very thin films.

S.Aronowitz: Journal of Applied Physics, 1991, 70[11], 6815-20