The variation in the diffusivity as a function of oxidation time was studied under extrinsic conditions. A model was developed which satisfactorily explained the variations. The model assumed that recombination between self-interstitials and vacancies took place, thus reducing their numbers, and their contribution to B diffusion. It was concluded that the model could fit the results by using only the interstitialcy diffusion component as a parameter. The best fit was obtained when the latter was equal to 0.4.

D.Tsoukalas: Journal of Applied Physics, 1991, 70[12], 7309-14