Dopant migration paths and activation energies for self-interstitial assisted migration were investigated on the basis of first-principles and critical path calculations. The results revealed that B migration could take various alternative routes. The present migration mechanisms suggested that B diffusion via the interstitialcy mechanism could involve a small pre-exponential factor, whereas dopant migration via an interstitial mechanism could involve large pre-exponential factors, as reflected by the experimental data.

K.Kato: Journal of Physics - Condensed Matter, 1994, 6[21], L287-92