Critical conditions, for the generation of misfit dislocations during B diffusion from chemical sources, were deduced analytically. The critical thickness of a highly-doped B region was defined in terms of the maximum concentration gradient, and analytical solutions of the B diffusion equation; for which a suitable dependence of the B diffusion coefficient upon concentration was deduced. The critical conditions were also explained in terms of the B surface concentration, diffusion time and diffusion temperature.

F.Gaiseanu: Solid State Phenomena, 1996, 47-48, 223-8