Specimens were bombarded with 5.68GeV 129Xe ions to fluences of 5 x 1011, 5 x 1012 or 5 x 1013/cm2, and were examined by using spreading resistance, electron paramagnetic resonance, optical absorption and X-ray diffraction techniques. The most highly damaged layer was found at depths ranging from 600 to 620; depending upon the fluence. These agreed well with the predicted projected range of 616. Deep tails of electrically active defects were found beyond the projected range. The intensities and ranges of these tails increased with fluence. No sign of amorphization was detected at any fluence. The peculiarities of the defect depth distribution of these ions led to the conclusion that most bombardment point defects were created by nuclear stopping, whereas the formation of amorphous areas was strongly suppressed by the electronic stopping power.

V.S.Varichenko, A.M.Zaitsev, N.M.Kazutchits, A.R.Chelyadinskii, N.M.Penina, V.A.Martinovich, Y.I.Latushko, W.R.Fahrner: Nuclear Instruments and Methods in Physics Research B, 1996, 107[1-4], 268-72