An investigation was made of the H molecules which formed in heavily doped n-type material under remote H atom treatments. The Raman lines of H2 were measured as a function of the substrate temperature during H atom treatment. A broad vibrational Raman H2 line could be clearly observed at around 4158/cm for substrate temperatures of between 250 and 500C. This indicated that H existed in molecular form in crystalline material. The vibrational Raman line of H2 exhibited its maximum intensity at a substrate temperature of 400C. An isotope shift was also detected at about 2990/cm in samples which had been treated with D atoms at 400C.

N.Fukata, S.Sasaki, K.Murakami, K.Ishioka, M.Kitajima, S.Fujimura, J.Kikuchi: Japanese Journal of Applied Physics, 1996, 35[2-8B], L1069-71