The effectiveness of strained-layer superlattices in reducing threading dislocations was studied. Transmission electron microscopy was used to investigate the dislocation structure. It was found that a strained-layer superlattice buffer was effective in blocking threading dislocations. Surface dislocations in ZnMgSSe could be reduced by using ZnMgSe/ZnSSe strained-layer superlattices. The dislocation density could be reduced further by adjusting the stress level of the strained-layer superlattice layer or by carefully designing it.

J.S.Kim, S.H.Suh, C.H.Kim, S.J.Chung: Solid State Communications, 1996, 100[12], 817-20