Various aspects of this technique were studied theoretically and experimentally. It was shown that complete grazing-incidence diffraction discrimination between coherent reflection, and diffuse scattering due to defects, required a 3-dimensional mapping to be made of reciprocal space. Such measurements could be carried out by using a combination of analyzer crystal and position-sensitive detector for the angular analysis of scattered X-rays in mutually perpendicular planes. Equations for the resolution function of grazing-incidence diffraction experiments were derived and were applied to the interpretation of grazing-incidence diffraction measurements of an AlAs/GaAs superlattice. Discrimination of diffuse scattering, due to interfacial roughness in the superlattice, was demonstrated.

E.A.Kondrashkina, S.A.Stepanov, M.Schmidbauer, R.Opitz, R.Köhler, H.Rhan: Journal of Applied Physics, 1997, 81[1], 175-83