A Monte Carlo program was developed for the calculation of ion trajectories, and for channelling spectrum simulation. The program was adapted to the analysis of the channelling spectra of compound crystals that contained point defects and crystalline precipitates. The program was applied to the structural analysis of GaAs crystals which were doped with Er, and co-doped with C and O. The present method indicated the lattice location of Er in Er- and C-doped GaAs and in Er- and O-doped GaAs. The simulations also revealed the formation of ErAs crystalline precipitates in heavily Er-doped GaAs crystals. This prediction was consistent with transmission electron microscopic observations.

J.Kaczanowski, Y.Yamamoto, Y.Kido, J.Nakata, K.Takahei: Nuclear Instruments and Methods in Physics Research B, 1996, 117[3], 275-82