Experimental data, which revealed the essential features of atomic H that had been incorporated from various sources at low temperatures, were presented. Appropriate conditions for hydrogenation were chosen, and the H diffusivity (table 32) was found to be described by:

D(cm2/s) = 0.00002 exp[-0.49(eV)/kT]

S.V.Koveshnikov, S.V.Nosenko, E.B.Yakimov: Physica Status Solidi A, 1990, 120[2], 391-5

Table 32

Diffusivity of H in Si