Diffusion in amorphous hydrogenated material, as studied by using implantation and secondary ion mass spectroscopic techniques, was found to be trap-limited. It was suggested that H probably diffused in a neutral charge state and was trapped by intrinsic (Si bonding) sites.

W.Beyer, U.Zastrow: Journal of Non-Crystalline Solids, 1993, 164-166[1], 289-92