The pairing reaction of interstitial Fe and substitutional B atoms, in Fe-diffused B-doped p-type material, was studied by using deep-level transient spectroscopy. Measurements were made as a function of storage time at temperatures of 0, 27, 42, 57 and 72C (table 52). The diffusivity of Fe at temperatures of between 0 and 72C was found to be described by the expression:

D(cm2/s) = 0.33 exp[-0.81(eV)/kT]

H.Nakashima, T.Isobe, Y.Yamamoto, K.Hashimoto: Japanese Journal of Applied Physics, 1988, 27[8], 1542-3

 

 

 

Table 52

Diffusion of Fe in Si

 

T (C)

D (cm2/s)

0

3.2 x 10-16

27

9.3 x 10-15

42

4.4 x 10-14

57

1.3 x 10-13

72

4.6 x 10-13