Profiles in samples which had been diffused with Fe at temperatures of between 800 and 1070C were determined by means of deep-level transient spectroscopy. It was found that the diffusivity of interstitial Fe within the above temperature range (table 53) was described by the expression:

D(cm2/s) = 0.00095 exp[-0.65(eV)/kT]

T.Isobe, H.Nakashima, K.Hashimoto: Japanese Journal of Applied Physics, 1989, 28[7], 1282-3

Table 53

Diffusion of Fe in Si