The effect of the charge state of Fe upon its diffusivity in p-type material was studied by using capacitance-voltage and deep-level transient spectroscopic methods. It was found that the migration enthalpies of both positive and neutral Fe were equal to 0.92 and 0.56eV, respectively (table 54). A disagreement between the predicted and observed results was explained in terms of the diffusion path, elastic strain and Coulombic interaction for various charge states.

S.V.Koveshnikov, G.A.Rozgonyi: Applied Physics Letters, 1995, 66[7], 860-2

 

 

 

Table 54

Diffusion of Fe in Si

 

Species

T (C)

D (cm2/s)

Feo

130

4.08 x 10-11

Feo

122

3.16 x 10-11

Feo

108

2.02 x 10-11

Feo

100

1.07 x 10-11

Feo

90

8.28 x 10-12

Fe+

130

3.16 x 10-12

Fe+

122

2.30 x 10-12

Fe+

108

1.0 x 10-12

Fe+

100

4.9 x 10-13

Fe+

90

2.78 x 10-13