A non-equilibrium kinetic model for P diffusion was developed. The concentrations of charged defects and defect-impurity pairs were explicitly determined by solving a system of quasi-linear equations. Each of these was of reaction-diffusion type, with a constant diffusivity. This formulation reproduced a number of previously published model results. The calculated profiles for a 600s pre-deposition exhibited both a tail and a well-defined kink plateau. The latter was a direct result of the kinetic model; under the assumption of strong bimolecular recombination.

W.B.Richardson, B.J.Mulvaney: Journal of Applied Physics, 1989, 65[6], 2243-7