The contribution of diffusion-induced structural changes to the anisotropy of P diffusion into monocrystalline material was analyzed. A difference in the dislocation densities on (100)-type and (111)-type planes, due to P diffusion on these planes, affected the diffusion process and led to anisotropy.

L.N.Larikov, E.I.Bogdanov, E.A.Maximenko: Crystal Research and Technology, 1990, 25[1], 51-4