A method was described for the measurement of equilibrium concentrations of vacancies at 800C. The concentration was established during long-term annealing in an inert and clean ambient. Assuming the predominant operation of the Frank-Turnbull mechanism during Pt diffusion at 800C, the equilibrium vacancy concentration could be deduced from the resultant diffusion profiles. A concentration of 4.1 x 1013/cm3 at 800C was deduced from the equations of the Frank-Turnbull mechanism. It was estimated that the vacancy diffusion coefficient was equal to 1.3 x 10-10cm2/s.

H.Zimmermann: Applied Physics Letters, 1991, 59[24], 3133-5