Oxidation-enhanced and oxidation-retarded diffusion effects were incorporated into differential equations for self-interstitials and vacancies. An extended relationship for the local equilibrium between interstitials and vacancies, VIm = n, was derived from asymptotic forms of the solutions to the oxidation-enhanced and oxidation-retarded diffusion equations. It was found that local equilibrium between interstitials and vacancies did not occur within the present range of diffusion times. Interstitial and vacancy diffusivities of 2.4 x 10-9 and 2.1 x 10-10cm2/s, respectively, at 1100C were deduced from the results. The corresponding thermal equilibrium concentrations were 3.3 x 1016 and 2.2 x 1017/cm3.

T.Okino, M.Onishi: Japanese Journal of Applied Physics 1, 1994, 33[6A], 3362-7