Transmission electron microscopic imaging and diffraction techniques were used to characterize defects in homo-epitaxial thin films. The Burgers vectors of the dislocations were deduced by combining high-angle convergent beam electron diffraction and conventional diffraction contrast techniques. It was shown that dislocations with Burgers vectors of c, a, and c+a were present, and that dislocation segments which lay in the interfacial plane were dissociated on a fine scale.

F.A.Ponce, D.Cherns, W.T.Young, J.W.Steeds: Applied Physics Letters, 1996, 69[6], 770-2