Molecular dynamics simulations were made of defect generation at the interface during the growth of epitaxial (100)-oriented Mo/W superlattices via ion-assisted deposition. The effect of the impact parameter within the irreducible body-centered cubic unit cell [001] surface, and of the incident ion energy, upon energy accommodation, energy-transfer dynamics and energy dissipation were considered. A detailed model was developed for the generation of point defects. The effect of materials upon the type and number of defects, as well as upon energy accommodation in the superlattice, was thereby revealed. It was shown that the behavior of the superlattice as a whole was dominated largely by the material in the surface monolayer.

M.H.Carlberg, E.P.Münger, V.Chirita: Physical Review B, 1996, 54[3], 2217-24