It was recalled that the binding energy between a vacancy and a P or As atom was large, and that the pair diffusion model (and decreased quasi-vacancy formation energy) were applicable to P and As diffusion. With decreasing quasi-vacancy formation energy, the binding energy also decreased. The anomalous diffusion of P consisted of 2 components: a tail and a plateau. The tail was attributed to the presence of excess vacancies, whose generation was typical of pair diffusion. The plateau was explained in terms of pair diffusion and a decrease in quasi-vacancy formation energy. It was emphasized that the large value of the effective P diffusion coefficient at the plateau was not anomalous.

M.Yoshida, E.Arai: Japanese Journal of Applied Physics, 1995, 34[1-11], 5891-903