Ion-beam mixing and radiation-enhanced diffusion were investigated in specimens with metallic films which were 60 to 70nm thick. They were bombarded with 150keV Ar+ ions, to doses of between 9 x 1015 and 1.5 x 1017/cm2, at 77 to 673K. The mixing behavior was analyzed by measuring concentration depth profiles using Rutherford back-scattering spectrometry. The results showed that the mixing efficiencies for all of the elements scaled linearly with the Ar+ ion dose.

K.Neubeck, C.E.Lefaucheui, H.Hahn, A.G.Balogh, H.Baumann, K.Bethge, D.M.Rück: Nuclear Instruments and Methods in Physics Research B, 1995, 106[1-4], 589-96