A transmission electron microscopic investigation was made of dislocation structures that were formed in coarse-grained (460) material that was implanted with 100keV Ti and Zr ions, using a vacuum arc ion source, to a dose of 1017/cm2. It was found that such implantation produced a dislocation structure in the sub-surface layers. This structure changed from cell-net and cell-dislocation, at small depths, to individual randomly distributed dislocations at greater depths. The maximum dislocation density was 6.1 x 109/cm2 for Ti, and 1.14 x 1010/cm2 for Zr. The thickness of the modified layer with a high dislocation density ranged up to 20 for Ti, and up to 50 for Zr. The long-range effect was attributed to the existence of static and dynamic mechanical stresses in the implanted surface layer.

J.P.Sharkeev, N.V.Girsova, A.I.Ryabchikov, E.V.Kozlov, O.B.Perevalova, I.G.Brown, X.Y.Yao: Nuclear Instruments and Methods in Physics Research B, 1995, 106[1-4], 532-7