A simple theory was proposed for iso-concentration and concentration-gradient dopant diffusion in semiconductors. This yielded 2 different effective diffusion coefficients. It was shown that, in the former case, the high value of the effective diffusivity was due to the fact that the sample was pre-doped to a concentration that was equal to the solubility limit for the dopant in question. In the latter case, a diffusivity which depended upon the local donor/acceptor density was obtained.

E.Antoncik: Journal of the Electrochemical Society, 1995, 142[9], 3170-3