Rutherford back-scattering and transmission electron microscopy were used to analyze Au-implanted (100) samples which contained various types of implantation-induced disorder before and after annealing. Gettering and precipitation phenomena were observed which indicated the occurrence of a complex diffusion behavior, and Au-defect interactions. In the case of samples which contained a sub-surface band of internal cavities, almost all of the implanted Au was gettered to these cavities during annealing (850C, 1h).

J.Wong-Leung, J.S.Williams, R.G.Elliman, E.Nygren, D.J.Eaglesham, D.C.Jacobson, J.M.Poate: Nuclear Instruments and Methods in Physics Research B, 1995, 96[1-2], 253-6