It was recalled that certain crystallite populations in microwave plasma chemical vapor-deposited films contained large octahedral grains that were oriented with [001] normal to the film, and were topped with (001) facets that were several tens of  in edge length. These facets exhibited characteristic growth-step patterns, and related characteristic cathodoluminescence patterns. A conflict between the interpretation of the step patterns, and the facet surface profiles which were determined interferometrically, required a quadrantal division of (001) facets by low-angle boundaries in order to explain it. The determination of misorientations by using electron channelling and electron back-scattering diffraction techniques confirmed this model. A partially polarized cathodoluminescence was observed that was attributed to dislocations which were associated with the low-angle boundaries. The occurrence of this misorientation texture in (001)-faceted chemical vapor-deposited crystallites was expected, regardless of the particular growth technique.

N.C.Burton, J.E.Butler, A.R.Lang, J.W.Steeds: Proceedings of the Royal Society A, 1995, 449, 555-66