By evaluating the low-temperature mobility of the 2-dimensional electron gas in heterostructures, a study was made of the nature of the damage which was introduced into the heterostructure by low-energy electron-beam irradiation at 90K. Isochronal annealing, photoluminescence and cathodoluminescence studies revealed that low-energy electron-beam irradiation created VAs-related complexes close to the hetero-interface.

T.Wada, T.Kanayama, T.Tada, X.L.Wang, Y.Sugiyama, M.Komuro: Materials Science Forum, 1995, 196-201, 1455-60