The characteristics of deep levels in monocrystals of n-type material, which had been grown by using liquid-encapsulated Czochralski or horizontal Bridgman methods, were studied by means of the spectral analysis of deep-level transient spectroscopy. Two trap levels, EL2 and EL3, were clearly observed; where the activation energy and the capture cross-section for EL2 and EL3 were estimated to be 0.78eV, 0.59eV, 7.8 x 10-14/cm2 and 5.8 x 10-13/cm2, respectively, in the case of liquid-encapsulated Czochralski samples. According to an analysis of the emission rate spectrum, E2 exhibited broadenings of 6 and 25% in the activation energy and capture cross-section, respectively. The EL3 was a discrete level, with no broadening of the deep level parameters.
K.Sato, K.Tanaka, J.Yoshino, Y.Okamoto, J.Morimoto, T.Miyakawa: Materials Science Forum, 1995, 196-201, 267-72