The category-II and category-III defects (end-of-range extrinsic dislocation loops, intrinsic stacking fault tetrahedra due to solid-phase epitaxial re-growth) which remained after annealing were studied in material which had been implanted with 200keV Fe ions. Upon increasing the annealing time, loop coarsening occurred (probably originating from an initial distribution of very small loops), whereas the density of category-III defects decreased.

C.Frigeri: Materials Science Forum, 1995, 196-201, 1273-8