A new method was developed for calculating the correlation functions, of random deformations in hetero-epitaxial layers and superlattices, on the basis of measurements of the iso-intensity contours of diffuse X-ray scattering. The method was based upon the optical coherence approach and upon kinematic diffraction theory. Structural models were found which permitted the correlation functions to be calculated for various types of randomly placed defect (mosaic blocks, random elastic deformations). The applicability of the method was demonstrated by measuring the diffuse X-ray scattering from a ZnTe layer which had been grown onto a GaAs substrate. The parameters which characterized the defects were obtained by comparing the calculated correlation functions with theoretical models.

V.Holý, K.Wolf, M.Kastner, H.Stanzl, W.Gebhardt: Journal of Applied Crystallography, 1994, 27[4], 551-7