It was recalled that most semiconductors consisted of elements which were made up of a number of stable isotopes. Access to highly enriched isotopes in macroscopic quantities opened up new possibilities for semiconductor defect studies. The use of isotope mass-sensitive effects, including the frequencies of local vibrational modes, nuclear spin, and nuclear cross-sections for thermal neutron capture, was reviewed with regard to the study of native and impurity defects.

E.E.Haller: Materials Science Forum, 1995, 196-201, 1491-6