Quantitative determinations were made of the contribution which As self-interstitials made to the As self-diffusion coefficient. Values of the As self-interstitial contribution were deduced from S in-diffusion profiles, which were simulated on the basis of a kick-out mechanism.

M.Uematsu, P.Werner, M.Schultz, T.Y.Tan, U.M.Gösele: Applied Physics Letters, 1995, 67[19], 2863-5