Hydrogenated amorphous films were deposited via the thermal dissociation of undiluted germane, and their properties were investigated by using infra-red spectroscopic, photo-thermal deflection spectroscopic, spectroscopic ellipsometric and conductivity measurements. It was found that there was a clear correlation between the defect density and the infra-red Ge-H stretching modes.

L.Zanzig, W.Beyer, H.Wagner: Applied Physics Letters, 1995, 67[11], 1567-9