Samples which had been implanted with 2MeV Er ions at 350C were studied by using Rutherford back-scattering and channelling spectroscopy. Angular scans through the <100>, <111> and <110> axial channels were carried out. Angular scan profiles of Er, especially the flux peak in the <110> scan profile, suggested that the implanted Er atoms were located mainly in the middle of the <110> channel (hexagonal interstitial site). Monte Carlo simulations were based upon the assumed hexagonal interstitial location of Er atoms. These reproduced well the experimental data, and provided additional confirmation of the location of the Er atoms in the middle of the <110> channel.

A.Kozanecki, R.J.Wilson, B.J.Sealy, J.Kaczanowski, L.Nowicki: Applied Physics Letters, 1995, 67[13], 1847-9