The change in the concentration profile, due to interdiffusion during annealing, was investigated by using Auger electron spectroscopic depth-profiling of multi-layered films. It was observed that the initial concentration distributions, which were almost rectangular in the unheated samples, changed into sinusoidal ones in annealed films at various temperatures. Concentration-independent interdiffusion coefficients were deduced from the amplitudes of the sinusoidal distributions (table 19). From Arrhenius plots, the activation energy was estimated to be equal to 1.66eV. The concentration-dependent interdiffusivity at 150C was also estimated by using the Boltzmann-Matano method.

Y.P.Lee, I.J.Jeon, J.H.Hong, J.H.Moon, J.I.Jeong, J.S.Kang: Materials Science Forum, 1995, 189-190, 411-6

Table 19

Interdiffusion Coefficients for Multi-Layered Pd/Cu Films